Advanced Mems Nems Fabrication And Sensors
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Language: en
Pages: 312
Pages: 312
Type: BOOK - Published: 2021-10-12 - Publisher: Springer Nature
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) an
Language: en
Pages: 404
Pages: 404
Type: BOOK - Published: 2021-10-01 - Publisher: Springer Nature
This volume focuses on the fundamentals and advancements in micro and nanomanufacturing technologies applied in the biomedical and biochemical domain. The conte
Language: en
Pages: 511
Pages: 511
Type: BOOK - Published: 2012-07-18 - Publisher: Elsevier
The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applic
Language: en
Pages: 242
Pages: 242
Type: BOOK - Published: 2019-11-20 - Publisher: MDPI
Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly e
Language: en
Pages: 512
Pages: 512
Type: BOOK - Published: 2015-04-22 - Publisher: John Wiley & Sons
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It
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