Chemical Physics Of Thin Film Deposition Processes For Micro And Nano Technologies
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Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media
An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is o
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Handbook of Thin Film Deposition, Fourth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor ind
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Pages: 430
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Type: BOOK - Published: 2001-02-01 - Publisher: William Andrew
New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor an
Language: en
Pages: 590
Pages: 590
Type: BOOK - Published: 2023-07-02 - Publisher: Springer Nature
This book explores chemical methods for thin film deposition with diverse nanostructured morphology and their applications. Unlike top-down techniques, chemical
Language: en
Pages: 721
Pages: 721
Type: BOOK - Published: 2020-08-27 - Publisher: Springer Nature
This volume comprises the expert contributions from the invited speakers at the 17th International Conference on Thin Films (ICTF 2017), held at CSIR-NPL, New D