Foundation of MEMA
Author | : Chang Liu |
Publisher | : Pearson Higher Ed |
Total Pages | : 577 |
Release | : 2014-09-18 |
ISBN-10 | : 9781292013985 |
ISBN-13 | : 1292013982 |
Rating | : 4/5 (982 Downloads) |
Download or read book Foundation of MEMA written by Chang Liu and published by Pearson Higher Ed. This book was released on 2014-09-18 with total page 577 pages. Available in PDF, EPUB and Kindle. Book excerpt: For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology — all in a time-efficient and methodical manner. A wealth of examples and problems solidify students’ understanding of abstract concepts and provide ample opportunities for practicing critical thinking.