Rapid Thermal Processing

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Rapid Thermal Processing
Language: en
Pages: 441
Authors: Richard B. Fair
Categories: Technology & Engineering
Type: BOOK - Published: 2012-12-02 - Publisher: Academic Press

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This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled envi
Rapid Thermal Processing of Semiconductors
Language: en
Pages: 374
Authors: Victor E. Borisenko
Categories: Technology & Engineering
Type: BOOK - Published: 2013-11-22 - Publisher: Springer Science & Business Media

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Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing e
Rapid Thermal Processing for Future Semiconductor Devices
Language: en
Pages: 161
Authors: H. Fukuda
Categories: Science
Type: BOOK - Published: 2003-04-02 - Publisher: Elsevier

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This volume is a collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, o
Advances in Rapid Thermal Processing
Language: en
Pages: 470
Authors: Fred Roozeboom
Categories: Technology & Engineering
Type: BOOK - Published: 1999 - Publisher: The Electrochemical Society

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Rapid Thermal and Other Short-time Processing Technologies III
Language: en
Pages: 500
Authors: Paul J. Timans
Categories: Technology & Engineering
Type: BOOK - Published: 2002 - Publisher: The Electrochemical Society

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