The Physics Of Moire Metrology

Download or read book The Physics of Moire Metrology written by Oded Kafri and published by Wiley-Interscience. This book was released on 1990-01-31 with total page 216 pages. Available in PDF, EPUB and Kindle. Book excerpt: This one volume treatise presents a comprehensive discussion of moire metrology analysis. The authors work from a new point of view, treating the gratings used in moire analysis as an artificial analog to electromagnetic waves, thereby comparing moire analysis with conventional optical methods based on wave properties such as interferometry. It is shown that for every interferometric technique in metrology, there is an analogous technique in moire metrology and vice versa, and that scientists involved in optical metrology have a real choice between interferometric and moire methods.