Thin Film Processes
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Language: en
Pages: 392
Pages: 392
Type: BOOK - Published: 2000-08-31 - Publisher: Cambridge University Press
This book covers the experimental and theoretical understanding of surface and thin film processes. It presents a unique description of surface processes in ads
Language: en
Pages: 577
Pages: 577
Type: BOOK - Published: 2012-12-02 - Publisher: Elsevier
Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this bo
Language: en
Pages: 629
Pages: 629
Type: BOOK - Published: 2002 - Publisher:
The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology exp
Language: en
Pages: 881
Pages: 881
Type: BOOK - Published: 2012-12-02 - Publisher: Elsevier
This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not
Language: en
Pages: 744
Pages: 744
Type: BOOK - Published: 1992 - Publisher: Academic Press
Prepared as a textbook complete with problems after each chapter, specifically intended for classroom use in universities.