ULSI Process Integration 6
| Author | : C. Claeys |
| Publisher | : The Electrochemical Society |
| Total Pages | : 547 |
| Release | : 2009-09 |
| ISBN-10 | : 9781566777445 |
| ISBN-13 | : 1566777445 |
| Rating | : 4/5 (445 Downloads) |
Book Synopsis ULSI Process Integration 6 by : C. Claeys
Download or read book ULSI Process Integration 6 written by C. Claeys and published by The Electrochemical Society. This book was released on 2009-09 with total page 547 pages. Available in PDF, EPUB and Kindle. Book excerpt: ULSI Process Integration 6 covers all aspects of process integration. Sections are devoted to 1) Device Technologies, 2) Front-end-of-line integration (gate stacks, shallow junctions, dry etching, etc.), 3) Back-end-of-line integration (CMP, low-k, Cu interconnect, air-gaps, 3D packaging, etc.), 4) Alternative channel technologies (Ge, III-V, hybrid integration), and 5) Emerging technologies (CNT, graphene, polymer electronics, nanotubes).
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