Adhesion Aspects in MEMS/NEMS
| Author | : Seong H. Kim |
| Publisher | : CRC Press |
| Total Pages | : 424 |
| Release | : 2011-02-18 |
| ISBN-10 | : 9789004190955 |
| ISBN-13 | : 9004190953 |
| Rating | : 4/5 (953 Downloads) |
Book Synopsis Adhesion Aspects in MEMS/NEMS by : Seong H. Kim
Download or read book Adhesion Aspects in MEMS/NEMS written by Seong H. Kim and published by CRC Press. This book was released on 2011-02-18 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects
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