Advances In Micro Nano Electromechanical Systems And Fabrication Technologies
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This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) an
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Pages: 76
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Type: BOOK - Published: 1997-12-15 - Publisher: National Academies Press
Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectiv
Language: en
Pages: 461
Pages: 461
Type: BOOK - Published: 2018-10-03 - Publisher: CRC Press
The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every
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The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applic
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