Chemical Vapor Deposition Fluid Flow Simulation Modelling Tool

Download or read book Chemical Vapor Deposition Fluid Flow Simulation Modelling Tool written by National Aeronautics and Space Administration NASA and published by . This book was released on 2018-11-13 with total page 138 pages. Available in PDF, EPUB and Kindle. Book excerpt: Accurate numerical simulation of chemical vapor deposition (CVD) processes requires a general purpose computational fluid dynamics package combined with specialized capabilities for high temperature chemistry. In this report, we describe the implementation of these specialized capabilities in the spectral element code NEKTON. The thermal expansion of the gases involved is shown to be accurately approximated by the low Mach number perturbation expansion of the incompressible Navier-Stokes equations. The radiative heat transfer between multiple interacting radiating surfaces is shown to be tractable using the method of Gebhart. The disparate rates of reaction and diffusion in CVD processes are calculated via a point-implicit time integration scheme. We demonstrate the use above capabilities on prototypical CVD applications. Bullister, Edward T. Unspecified Center FLUID DYNAMICS; FLUID MECHANICS; GAS EXPANSION; HIGH TEMPERATURE; INCOMPRESSIBLE FLOW; MATHEMATICAL MODELS; NAVIER-STOKES EQUATION; RADIATIVE HEAT TRANSFER; REACTION KINETICS; THERMAL EXPANSION; VAPOR DEPOSITION; COMPUTATIONAL FLUID DYNAMICS; COMPUTERIZED SIMULATION; DIFFUSION...