Directed Self Assembly Of Block Copolymers With Density Multiplication And Its Integration With Lithographic Processes

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Directed Self-assembly of Block Copolymers with Density Multiplication and Its Integration with Lithographic Processes

Author	: Chi-Chun Liu
Publisher	:
Total Pages	: 167
Release	: 2011
ISBN-10	: OCLC:773193930
ISBN-13	:
Rating	: 4/5 ( Downloads)

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Book Synopsis Directed Self-assembly of Block Copolymers with Density Multiplication and Its Integration with Lithographic Processes by : Chi-Chun Liu

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