Numerical Modeling Of Vapor Behavior In Effusion Sources Used In Thin Film Deposition Processes

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Numerical Modeling of Vapor Behavior in Effusion Sources Used in Thin-film Deposition Processes

Numerical Modeling of Vapor Behavior in Effusion Sources Used in Thin-film Deposition Processes
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Total Pages : 60
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ISBN-10 : OCLC:54056982
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Book Synopsis Numerical Modeling of Vapor Behavior in Effusion Sources Used in Thin-film Deposition Processes by : Mark J. Pavol

Download or read book Numerical Modeling of Vapor Behavior in Effusion Sources Used in Thin-film Deposition Processes written by Mark J. Pavol and published by . This book was released on 2002 with total page 60 pages. Available in PDF, EPUB and Kindle. Book excerpt:


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A number of workers in the field of Chemical vapor deposition (CVD) have presented mathematical models in the literature. Some workers were able to produce anal
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This work describes the development of a mathematical model of ahigh-pressure chemical vapor deposition (HPCVD) reactor and nonlinearfeedback methodologies for