Plasma Processing of Semiconductors
| Author | : Paul Williams |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 634 |
| Release | : 1997-05-31 |
| ISBN-10 | : 0792345673 |
| ISBN-13 | : 9780792345671 |
| Rating | : 4/5 (671 Downloads) |
Download or read book Plasma Processing of Semiconductors written by Paul Williams and published by Springer Science & Business Media. This book was released on 1997-05-31 with total page 634 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
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