Semiconductor Strain Metrology

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Semiconductor Strain Metrology

Author	: Terence K. S. Wong
Publisher	: Bentham Science Publishers
Total Pages	: 141
Release	: 2012
ISBN-10	: 9781608053599
ISBN-13	: 1608053598
Rating	: 4/5 (598 Downloads)

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Book Synopsis Semiconductor Strain Metrology by : Terence K. S. Wong

Download or read book Semiconductor Strain Metrology written by Terence K. S. Wong and published by Bentham Science Publishers. This book was released on 2012 with total page 141 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers involved in thin film and nanoscale device characterizati

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