The Physics Of Micro Nano Fabrication

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The Physics of Micro/Nano-Fabrication

Author	: Ivor Brodie
Publisher	: Springer Science & Business Media
Total Pages	: 661
Release	: 2013-06-29
ISBN-10	: 9781475767759
ISBN-13	: 1475767757
Rating	: 4/5 (757 Downloads)

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Book Synopsis The Physics of Micro/Nano-Fabrication by : Ivor Brodie

Download or read book The Physics of Micro/Nano-Fabrication written by Ivor Brodie and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 661 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

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This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary te

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In this book, the fundamentals of micro- and nanofabrication are described on the basis of the concept of “using gases as a fabrication tool.” Unlike other