A Flexible Interconnection For Integrated Circuits

Download or read book A Flexible Interconnection for Integrated Circuits written by Qingqi Wang and published by . This book was released on 1997 with total page 126 pages. Available in PDF, EPUB and Kindle. Book excerpt: The semiconductor industry has developed at an unprecedented rate in the past two decades. Newer technology innovations have enabled the design of more complex structures. However, those IC chips are mostly fabricated on thick crystalline substrates and are not physically flexible. Flexibility of integrated circuits is very important in designing some devices such as small microprobes, sensors and disk drive flexible read/write assemblies. This thesis covers the study, analysis and fabrication of a flexible interconnection method for integrated circuits. Following standard processing steps of a commercial integrated circuit chip, an etching step is added to fabricate a flexible interconnection. This work starts with an investigation of a mechanical model in flexible interconnection design, which is a wide beam with applied moments. Theoretical calculations and tool simulations are provided to give a correct picture of bending an interconnecting membrane.