Chemical And Biological Sensors 11 And Mems Nems 11

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Chemical and Biological Sensors 11 -and- MEMS/NEMS 11

Author	: Z. Aguilar
Publisher	: The Electrochemical Society
Total Pages	: 262
Release	: 2014
ISBN-10	: 9781607685371
ISBN-13	: 160768537X
Rating	: 4/5 (37X Downloads)

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Book Synopsis Chemical and Biological Sensors 11 -and- MEMS/NEMS 11 by : Z. Aguilar

Download or read book Chemical and Biological Sensors 11 -and- MEMS/NEMS 11 written by Z. Aguilar and published by The Electrochemical Society. This book was released on 2014 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt:

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The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the