Laser Assisted Microtechnology

Download or read book Laser-Assisted Microtechnology written by Simeon M. Metev and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 283 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser-Assisted Microtechnology introduces the principles and techniques of laser-assisted microtechnology with emphasis on micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The experimental and theoretical physico-chemical basis of every technological process is presented in detail. On the basis of some characteristic examples of applications, the capabilities of the technological methods as well as the optimum conditions for their realization are discussed. In this second edition, besides the actualization of the literature, a new chapter concerning the laser-assisted wet chemical micro etching, has been added. This is a new method for direct 3D-micro structuring of solids, with a number of potential applications.