Plasma Aided Nanofabrication

Download or read book Plasma-Aided Nanofabrication written by Ken Ostrikov and published by John Wiley & Sons. This book was released on 2007-09-24 with total page 315 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications.