Rapid Thermal Processing of Semiconductors
| Author | : Victor E. Borisenko |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 374 |
| Release | : 2013-11-22 |
| ISBN-10 | : 9781489918048 |
| ISBN-13 | : 1489918043 |
| Rating | : 4/5 (043 Downloads) |
Book Synopsis Rapid Thermal Processing of Semiconductors by : Victor E. Borisenko
Download or read book Rapid Thermal Processing of Semiconductors written by Victor E. Borisenko and published by Springer Science & Business Media. This book was released on 2013-11-22 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
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