Sputtering By Particle Bombardment Ii

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Sputtering by Particle Bombardment II

Sputtering by Particle Bombardment II
Author :
Publisher :
Total Pages : 412
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ISBN-10 : 3662311682
ISBN-13 : 9783662311684
Rating : 4/5 (684 Downloads)
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Book Synopsis Sputtering by Particle Bombardment II by : R. Behrisch

Download or read book Sputtering by Particle Bombardment II written by R. Behrisch and published by . This book was released on 2014-01-15 with total page 412 pages. Available in PDF, EPUB and Kindle. Book excerpt:


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This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic a
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Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many
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In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detai