Thin-film Bulk Acoustic Resonators on Integrated Circuits for Physical Sensing Applications
Author | : Matthew Leigh Johnston |
Publisher | : |
Total Pages | : |
Release | : 2012 |
ISBN-10 | : OCLC:880373580 |
ISBN-13 | : |
Rating | : 4/5 ( Downloads) |
Download or read book Thin-film Bulk Acoustic Resonators on Integrated Circuits for Physical Sensing Applications written by Matthew Leigh Johnston and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of 0.8-1.5 GHz FBAR devices is validated for both off-chip and on-chip devices, and the integrated system is characterized for sensitivity and limit of detection. On-chip, parallel measurement of multiple sensors in real time is demonstrated for a quantitative vapor sensing application, and the limit of detection is below 50 ppm. This sensor platform could be used for a broad scope of label-free detection applications in chemistry, biology, and medicine, and it demonstrates potential for enabling a low-cost, point of use instrument.