The Influence of Annealing on Thin Films of Beta SiC
| Author | : Irvin Berman |
| Publisher | : |
| Total Pages | : 24 |
| Release | : 1972 |
| ISBN-10 | : UOM:39015095325455 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis The Influence of Annealing on Thin Films of Beta SiC by : Irvin Berman
Download or read book The Influence of Annealing on Thin Films of Beta SiC written by Irvin Berman and published by . This book was released on 1972 with total page 24 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin films of beta silicon carbide were prepared on alpha silicon carbide substrates by the chemical vapor deposition (CVD) technique involving the hydrogen reduction of silane and propane. The films were prepared under a variety of conditions and subsequently subjected to thermal annealing cycles between 1600 degrees C and 2000 degrees C. It is shown that the single crystallinity of the beta films improved with continued annealing. The beta polytype was found to be stable over the entire range of temperatures studied.
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